Asml svg 90-s duv coat/develop i-line track 200MM

What is for sale: Asml svg 90-s duv coat/develop i-line track 200MM

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ASML SVG 90-S DUV Coat/Develop I-Line Track
• Manufacturer: ASML USA INC
• Wafer Size: 200mm, notched
• 104” Stand-Alone Cabinet
• 2 Coat Modules w/chemical edge bead removal, 2 Develop Modules, 6 Vacuum Back Ovens, 2 Vapor Prime Ovens, 3 chill Plates, 1 OEBR Module
• Photoresist Temperature control
• Air Temperature and Humidity control (Coater and Developer)
• Complete air recirculation environmental control over all modules
• 4 serial arms and 1 90SE serial arm
• Floor is solid SS spill containment w/overflow sensors
• Solid doors in front of gauges and flow meters
• Control Module on CES, (left or right-integrated)
• Coater direct floor drain (Tee in cabinet)
• Developer direct floor drain (Tee in cabinet)
• Full clogged drain sensor on each coater
• Full SEMI S2-93 Containment for solvent/pump drawer enclosures, bulkhead
• Facility sensors for vacuum generators, DI water and Caustic exhaust