Precision x-y positioning system/semiconductor stepper

What is for sale: Precision x-y positioning system/semiconductor stepper

---

Precision X-Y Positioning System removed from a semiconductor wafer stepper. The following components are included with this system:
1. Precision X-Y stage. This stage is compumotor driven with Heidenhain .1 micrometer scales.
2. CPU including resident software (DOS-UNIX based) with compumotor PC board and two compumotor S series motor drivers.
The following is the original stage specifications:
The specifications of the 6x6 X-Y stage are as follows:
Bi-Directional repeatability (1σ): ≤0.5 µm
Linear accuracy (3σ): 2 µm / inch
Straightness of travel: 5 m over travel
Flatness of travel: 5 µm over travel
Additional photographs are available.
* Operating Condition: Not Tested
* Sales Tax: California residents must pay state sale tax
Please visit our Store for additional items.